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Department of Electrical Engineering
Atul Vir Singh
Assistant Professor,
Department of Electrical Engineering,
School of Engineering
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Education Details
Ph.D, Centre for Applied Research in Electronics, Indian Institute of Technology Delhi, New Delhi (2013).
M.Tech (Solid State Materials), Indian Institute of Technology Delhi, New Delhi, 2006

Professional Experience
With SNU from 21st May, 2012.

Introduction to Electrical Engineering, Semiconductor Devices, Analog Electronics, Semiconductor
Optoelectronics, IC /VLSI Technology, Micro-Electro-Mechanical System (MEMS) Technology.

Research Interests
MEMS Technology (micro-machining, acoustic resonators: FBAR, sensors etc.)
MEMS materials (piezoelectric): synthesis and their integration in MEMS

Select Publications
International Journals
Atul Vir Singh, Sudhir Chandra, Sushil Kumar and G.Bose "Mechanical and structural properties of RF magnetron sputter deposited silicon carbide films for MEMS applications" Journal of Micromechanics and Microengineering, 22, No. 2 (2012) 025010 .

Sudhir Chandra, Atul Vir Singh "Preparation and characterization of piezoelectric films of ZnO and AlN by RF sputtering for RF MEMS applications", Key Engineering Materials 500 (2012) 84-89.

Atul Vir Singh, Sudhir Chandra and G. Bose, "Deposition and characterization of c-axis oriented aluminum nitride films by radio frequency magnetron sputtering without external substrate heating", Thin Solid Films, 519 (2011) 5846-5853.

Atul Vir Singh, Sudhir Chandra and Gouranga Bose, "Fabrication of Micro-cantilevers Using RF Magnetron Sputtered Silicon Carbide Films", Advanced Materials Research, 254 (2011) 163-166.

Somsing Rathod, Atul Vir Singh, Sudhir Chandra, Shiban K. Koul "Design, Fabrication and Characterization of ZnO based thin film bulk acoustic resonator" Advanced Materials Research, 254 (2011) 144-147.

Atul Vir Singh, Sudhir Chandra, A.K. Srivastava, B.R. Chakroborty, G. Sehgal, M. Dalai, G. Bose "Structural and optical properties of RF magnetron sputtered aluminum nitride films without external substrate heating" Applied Surface Science, 257 (2011) 9572-9577.

International Conference/Symposium
Jyotirmoy Datta, Atul Vir Singh, Sonal Singhal, and Madhur Deo Upadhyay "MBVD Equivalent Model of a ZnO/Al Based Film Bulk Acoustic Resonator for Microwave Filter Applications" to be presented in 7th ISSS International Conference on Smart Material structures and Systems (ISSS-2014) during 8-11th July 2014 at Indian Institute of Science, Bangalore.

Sudhir Chandra and Atul Vir Singh "MEMS based film bulk acoustic resonator usingh RF magnetron sputtered Aluminum Nitride films: Prototype fabrication and testing" Invited oral talk, presented in 17th International Workshop on the Physics of Semiconductor Devices (IWPSD 2013, Dec.10-13, 2013).

Jyotirmoy Datta, Atul Vir Singh and Sonal Singhal "Study on dsig and simulation of zinc oxide based film bulk acoustic resonator for RF filters" presented in 17th International Workshop on the Physics of Semiconductor Devices (IWPSD, Dec.10-13, 2013).

Atul Vir Singh, Sudhir Chandra, Sushil Kumar, and G. Bose "Mechanical properties of sputter deposited SiC films by nano-indentation" International workshop on physics of semiconductor devices (IWPSD 2011), presented in IIT Kanpur, Kanpur.

Atul Vir Singh, G.Bose, and Sudhir Chandra, "A Study on Deposition and Characterization of RF Magnetron Sputtered Aluminum Nitride Films", International workshop on physics of semiconductor devices, (IWPSD) 2009, Jamia Milia Islamia, New Delhi, INDIA.

Atul Vir Singh, G.Bose, S. Chandra, and Sushil Kumar, "RF Sputtered Silicon Carbide Films for MEMS Applications", International conference on MEMS (ICMEMS-2009), IIT Madras, Chennai, INDIA.

National Workshop/Conference (Invited Talks)
Multidisciplinary faculty summit covering recent trends in Advanced Wireless Communication, VLSI & Embedded Systems and BigData, 8th March 2014, organized by "The Center for Research and Innovation Exchange" (TCRIX- Hyderabad) at Steller Gymkhana, Greter Noida UP.

National conference on trends in signal processing communication, 12-14 April 2014, organized by Bhagwant Institute of Technology, Bhagwantpuram, PO-Miranpur Dist. Muzaffarnagar, UP.

Executive Summary
Atul Vir Singh has joined the Shiv Nadar University in May, 2012. He is working in the area of Micro-Electro-Mechanical-Systems (MEMS) technologies. He has extensive experience in MEMS processing techniques (surface and bulk micro-machining, anodic bonding, etch-stop, etc.) used to fabricate these devices. In order to promote MEMS research, he is interested in developing a MEMS design and fabrication facility for the post graduate and research students.
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